Capa. : 10,000t/y ~<br />Purity : < 10ppt (Fe 기준)<br />Material : Borosilicate glass 3.3
Capa. : 2,000t/y ~<br />Purity : < 100ppt (Fe 기준)<br />Material : Borosilicate glass 3.3
Capa. : 10,000t/y ~<br />Purity : < 10ppt (Fe 기준)<br />Material : N-PTFE, PFA